Schottky barrier height modulation with aluminum segregation and pulsed laser anneal: A route for contact resistance reduction

Schottky barrier height modulation with aluminum segregation and pulsed laser anneal: A route for contact resistance reduction

10.1109/IWJT.2010.5474983

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Main Authors: Koh, S.-M., Ng, C.-M., Liu, P., Mo, Z.-Q., Wang, X., Zheng, H., Zhao, Z.-Y., Variam, N., Henry, T., Erokhin, Y., Samudra, G.S., Yeo, Y.-C.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/84156
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-841562015-01-09T05:28:06Z Schottky barrier height modulation with aluminum segregation and pulsed laser anneal: A route for contact resistance reduction Koh, S.-M. Ng, C.-M. Liu, P. Mo, Z.-Q. Wang, X. Zheng, H. Zhao, Z.-Y. Variam, N. Henry, T. Erokhin, Y. Samudra, G.S. Yeo, Y.-C. ELECTRICAL & COMPUTER ENGINEERING 10.1109/IWJT.2010.5474983 IWJT-2010: Extended Abstracts - 2010 International Workshop on Junction Technology 86-89 2014-10-07T04:49:26Z 2014-10-07T04:49:26Z 2010 Conference Paper Koh, S.-M.,Ng, C.-M.,Liu, P.,Mo, Z.-Q.,Wang, X.,Zheng, H.,Zhao, Z.-Y.,Variam, N.,Henry, T.,Erokhin, Y.,Samudra, G.S.,Yeo, Y.-C. (2010). Schottky barrier height modulation with aluminum segregation and pulsed laser anneal: A route for contact resistance reduction. IWJT-2010: Extended Abstracts - 2010 International Workshop on Junction Technology : 86-89. ScholarBank@NUS Repository. <a href="https://doi.org/10.1109/IWJT.2010.5474983" target="_blank">https://doi.org/10.1109/IWJT.2010.5474983</a> 9781424458691 http://scholarbank.nus.edu.sg/handle/10635/84156 NOT_IN_WOS Scopus
institution National University of Singapore
building NUS Library
country Singapore
collection ScholarBank@NUS
description 10.1109/IWJT.2010.5474983
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
Koh, S.-M.
Ng, C.-M.
Liu, P.
Mo, Z.-Q.
Wang, X.
Zheng, H.
Zhao, Z.-Y.
Variam, N.
Henry, T.
Erokhin, Y.
Samudra, G.S.
Yeo, Y.-C.
format Conference or Workshop Item
author Koh, S.-M.
Ng, C.-M.
Liu, P.
Mo, Z.-Q.
Wang, X.
Zheng, H.
Zhao, Z.-Y.
Variam, N.
Henry, T.
Erokhin, Y.
Samudra, G.S.
Yeo, Y.-C.
spellingShingle Koh, S.-M.
Ng, C.-M.
Liu, P.
Mo, Z.-Q.
Wang, X.
Zheng, H.
Zhao, Z.-Y.
Variam, N.
Henry, T.
Erokhin, Y.
Samudra, G.S.
Yeo, Y.-C.
Schottky barrier height modulation with aluminum segregation and pulsed laser anneal: A route for contact resistance reduction
author_sort Koh, S.-M.
title Schottky barrier height modulation with aluminum segregation and pulsed laser anneal: A route for contact resistance reduction
title_short Schottky barrier height modulation with aluminum segregation and pulsed laser anneal: A route for contact resistance reduction
title_full Schottky barrier height modulation with aluminum segregation and pulsed laser anneal: A route for contact resistance reduction
title_fullStr Schottky barrier height modulation with aluminum segregation and pulsed laser anneal: A route for contact resistance reduction
title_full_unstemmed Schottky barrier height modulation with aluminum segregation and pulsed laser anneal: A route for contact resistance reduction
title_sort schottky barrier height modulation with aluminum segregation and pulsed laser anneal: a route for contact resistance reduction
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/84156
_version_ 1681089567034179584

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