State-of-the-art surface passivation of boron emitters using inline PECVD AlOx/SiNx stacks for industrial high-efficiency silicon wafer solar cells

10.1109/PVSC.2012.6317780

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Bibliographic Details
Main Authors:	Duttagupta, S., Lin, F., Shetty, K.D., Wilson, M., Ma, F.-J., Lin, J., Aberle, A.G., Hoex, B.
Other Authors:	SOLAR ENERGY RESEARCH INST OF S'PORE
Format:	Conference or Workshop Item
Published:	2014
Subjects:	boron emitter firing activation industrial PECVD AlOx/SiN x stacks surface passivation
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/84221
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-84221
record_format	dspace
spelling	sg-nus-scholar.10635-842212015-01-08T04:42:08Z State-of-the-art surface passivation of boron emitters using inline PECVD AlOx/SiNx stacks for industrial high-efficiency silicon wafer solar cells Duttagupta, S. Lin, F. Shetty, K.D. Wilson, M. Ma, F.-J. Lin, J. Aberle, A.G. Hoex, B. SOLAR ENERGY RESEARCH INST OF S'PORE ELECTRICAL & COMPUTER ENGINEERING boron emitter firing activation industrial PECVD AlOx/SiN x stacks surface passivation 10.1109/PVSC.2012.6317780 Conference Record of the IEEE Photovoltaic Specialists Conference 1036-1039 CRCND 2014-10-07T04:50:11Z 2014-10-07T04:50:11Z 2012 Conference Paper Duttagupta, S.,Lin, F.,Shetty, K.D.,Wilson, M.,Ma, F.-J.,Lin, J.,Aberle, A.G.,Hoex, B. (2012). State-of-the-art surface passivation of boron emitters using inline PECVD AlOx/SiNx stacks for industrial high-efficiency silicon wafer solar cells. Conference Record of the IEEE Photovoltaic Specialists Conference : 1036-1039. ScholarBank@NUS Repository. <a href="https://doi.org/10.1109/PVSC.2012.6317780" target="_blank">https://doi.org/10.1109/PVSC.2012.6317780</a> 9781467300643 01608371 http://scholarbank.nus.edu.sg/handle/10635/84221 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
topic	boron emitter firing activation industrial PECVD AlOx/SiN x stacks surface passivation
spellingShingle	boron emitter firing activation industrial PECVD AlOx/SiN x stacks surface passivation Duttagupta, S. Lin, F. Shetty, K.D. Wilson, M. Ma, F.-J. Lin, J. Aberle, A.G. Hoex, B. State-of-the-art surface passivation of boron emitters using inline PECVD AlOx/SiNx stacks for industrial high-efficiency silicon wafer solar cells
description	10.1109/PVSC.2012.6317780
author2	SOLAR ENERGY RESEARCH INST OF S'PORE
author_facet	SOLAR ENERGY RESEARCH INST OF S'PORE Duttagupta, S. Lin, F. Shetty, K.D. Wilson, M. Ma, F.-J. Lin, J. Aberle, A.G. Hoex, B.
format	Conference or Workshop Item
author	Duttagupta, S. Lin, F. Shetty, K.D. Wilson, M. Ma, F.-J. Lin, J. Aberle, A.G. Hoex, B.
author_sort	Duttagupta, S.
title	State-of-the-art surface passivation of boron emitters using inline PECVD AlOx/SiNx stacks for industrial high-efficiency silicon wafer solar cells
title_short	State-of-the-art surface passivation of boron emitters using inline PECVD AlOx/SiNx stacks for industrial high-efficiency silicon wafer solar cells
title_full	State-of-the-art surface passivation of boron emitters using inline PECVD AlOx/SiNx stacks for industrial high-efficiency silicon wafer solar cells
title_fullStr	State-of-the-art surface passivation of boron emitters using inline PECVD AlOx/SiNx stacks for industrial high-efficiency silicon wafer solar cells
title_full_unstemmed	State-of-the-art surface passivation of boron emitters using inline PECVD AlOx/SiNx stacks for industrial high-efficiency silicon wafer solar cells
title_sort	state-of-the-art surface passivation of boron emitters using inline pecvd alox/sinx stacks for industrial high-efficiency silicon wafer solar cells
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/84221
_version_	1681089578825416704

State-of-the-art surface passivation of boron emitters using inline PECVD AlOx/SiNx stacks for industrial high-efficiency silicon wafer solar cells

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