State-of-the-art surface passivation of boron emitters using inline PECVD AlOx/SiNx stacks for industrial high-efficiency silicon wafer solar cells

• Main Authors: Duttagupta, S., Lin, F., Shetty, K.D., Wilson, M., Ma, F.-J., Lin, J., Aberle, A.G., Hoex, B.
• Other Authors: SOLAR ENERGY RESEARCH INST OF S'PORE
• Format: Conference or Workshop Item
• Published: 2014
• Subjects: boron emitter; firing activation; industrial PECVD AlOx/SiN x stacks; surface passivation
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/84221
• Institution: National University of Singapore

10.1109/PVSC.2012.6317780