STI-induced damage and hot-carrier reliability in the narrow width short channel NMOSFET fabricated using global strained-Si technology

10.1109/ESSDER.2005.1546702

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Bibliographic Details
Main Authors: Phua, W.H.T., Ang, D.S., Ling, C.H., Chui, K.J.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/84226
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Institution: National University of Singapore