STI-induced damage and hot-carrier reliability in the narrow width short channel NMOSFET fabricated using global strained-Si technology

10.1109/ESSDER.2005.1546702

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Main Authors: Phua, W.H.T., Ang, D.S., Ling, C.H., Chui, K.J.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/84226
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-842262023-10-30T22:53:30Z STI-induced damage and hot-carrier reliability in the narrow width short channel NMOSFET fabricated using global strained-Si technology Phua, W.H.T. Ang, D.S. Ling, C.H. Chui, K.J. ELECTRICAL & COMPUTER ENGINEERING 10.1109/ESSDER.2005.1546702 Proceedings of ESSDERC 2005: 35th European Solid-State Device Research Conference 2005 533-536 2014-10-07T04:50:15Z 2014-10-07T04:50:15Z 2005 Conference Paper Phua, W.H.T., Ang, D.S., Ling, C.H., Chui, K.J. (2005). STI-induced damage and hot-carrier reliability in the narrow width short channel NMOSFET fabricated using global strained-Si technology. Proceedings of ESSDERC 2005: 35th European Solid-State Device Research Conference 2005 : 533-536. ScholarBank@NUS Repository. https://doi.org/10.1109/ESSDER.2005.1546702 0780392035 http://scholarbank.nus.edu.sg/handle/10635/84226 000236176200125 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
description 10.1109/ESSDER.2005.1546702
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
Phua, W.H.T.
Ang, D.S.
Ling, C.H.
Chui, K.J.
format Conference or Workshop Item
author Phua, W.H.T.
Ang, D.S.
Ling, C.H.
Chui, K.J.
spellingShingle Phua, W.H.T.
Ang, D.S.
Ling, C.H.
Chui, K.J.
STI-induced damage and hot-carrier reliability in the narrow width short channel NMOSFET fabricated using global strained-Si technology
author_sort Phua, W.H.T.
title STI-induced damage and hot-carrier reliability in the narrow width short channel NMOSFET fabricated using global strained-Si technology
title_short STI-induced damage and hot-carrier reliability in the narrow width short channel NMOSFET fabricated using global strained-Si technology
title_full STI-induced damage and hot-carrier reliability in the narrow width short channel NMOSFET fabricated using global strained-Si technology
title_fullStr STI-induced damage and hot-carrier reliability in the narrow width short channel NMOSFET fabricated using global strained-Si technology
title_full_unstemmed STI-induced damage and hot-carrier reliability in the narrow width short channel NMOSFET fabricated using global strained-Si technology
title_sort sti-induced damage and hot-carrier reliability in the narrow width short channel nmosfet fabricated using global strained-si technology
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/84226
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