Theoretical study of the output energy for various MEMS based electrostatic mechanisms

10.1109/ICSET.2008.4747069

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Bibliographic Details
Main Authors:	Lim, Y.M., Yang, B., Kotlanka, R.K., Heng, C.H., Xie, J., Tang, M., Han, J.H., Feng, H., Lee, C.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/84296
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Institution:	National University of Singapore

Description
Summary:	10.1109/ICSET.2008.4747069

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