Theoretical study of the output energy for various MEMS based electrostatic mechanisms

• Main Authors: Lim, Y.M., Yang, B., Kotlanka, R.K., Heng, C.H., Xie, J., Tang, M., Han, J.H., Feng, H., Lee, C.
• Other Authors: ELECTRICAL & COMPUTER ENGINEERING
• Format: Conference or Workshop Item
• Published: 2014
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/84296
• Institution: National University of Singapore

10.1109/ICSET.2008.4747069