Theoretical study of the output energy for various MEMS based electrostatic mechanisms
10.1109/ICSET.2008.4747069
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Main Authors: | Lim, Y.M., Yang, B., Kotlanka, R.K., Heng, C.H., Xie, J., Tang, M., Han, J.H., Feng, H., Lee, C. |
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Other Authors: | ELECTRICAL & COMPUTER ENGINEERING |
Format: | Conference or Workshop Item |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/84296 |
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Institution: | National University of Singapore |
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