Adhesion measurement of thin films to a porous low dielectric constant film using a modified tape test

10.1163/156856102760099906

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Bibliographic Details
Main Authors:	Goh, L.L.N., Toh, S.L., Chooi, S.Y.M., Tay, T.E.
Other Authors:	CHEMICAL & ENVIRONMENTAL ENGINEERING
Format:	Article
Published:	2014
Subjects:	Adhesion Low-k film Peel force Peel rate Tape test
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/84840
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-84840
record_format	dspace
spelling	sg-nus-scholar.10635-848402023-10-27T07:49:01Z Adhesion measurement of thin films to a porous low dielectric constant film using a modified tape test Goh, L.L.N. Toh, S.L. Chooi, S.Y.M. Tay, T.E. CHEMICAL & ENVIRONMENTAL ENGINEERING MECHANICAL ENGINEERING Adhesion Low-k film Peel force Peel rate Tape test 10.1163/156856102760099906 Journal of Adhesion Science and Technology 16 6 729-744 JATEE 2014-10-07T09:00:54Z 2014-10-07T09:00:54Z 2002 Article Goh, L.L.N., Toh, S.L., Chooi, S.Y.M., Tay, T.E. (2002). Adhesion measurement of thin films to a porous low dielectric constant film using a modified tape test. Journal of Adhesion Science and Technology 16 (6) : 729-744. ScholarBank@NUS Repository. https://doi.org/10.1163/156856102760099906 01694243 http://scholarbank.nus.edu.sg/handle/10635/84840 000176562800006 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Adhesion Low-k film Peel force Peel rate Tape test
spellingShingle	Adhesion Low-k film Peel force Peel rate Tape test Goh, L.L.N. Toh, S.L. Chooi, S.Y.M. Tay, T.E. Adhesion measurement of thin films to a porous low dielectric constant film using a modified tape test
description	10.1163/156856102760099906
author2	CHEMICAL & ENVIRONMENTAL ENGINEERING
author_facet	CHEMICAL & ENVIRONMENTAL ENGINEERING Goh, L.L.N. Toh, S.L. Chooi, S.Y.M. Tay, T.E.
format	Article
author	Goh, L.L.N. Toh, S.L. Chooi, S.Y.M. Tay, T.E.
author_sort	Goh, L.L.N.
title	Adhesion measurement of thin films to a porous low dielectric constant film using a modified tape test
title_short	Adhesion measurement of thin films to a porous low dielectric constant film using a modified tape test
title_full	Adhesion measurement of thin films to a porous low dielectric constant film using a modified tape test
title_fullStr	Adhesion measurement of thin films to a porous low dielectric constant film using a modified tape test
title_full_unstemmed	Adhesion measurement of thin films to a porous low dielectric constant film using a modified tape test
title_sort	adhesion measurement of thin films to a porous low dielectric constant film using a modified tape test
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/84840
_version_	1781784519727120384

Adhesion measurement of thin films to a porous low dielectric constant film using a modified tape test

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