Adhesion measurement of thin films to a porous low dielectric constant film using a modified tape test

10.1163/156856102760099906

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Bibliographic Details
Main Authors:	Goh, L.L.N., Toh, S.L., Chooi, S.Y.M., Tay, T.E.
Other Authors:	CHEMICAL & ENVIRONMENTAL ENGINEERING
Format:	Article
Published:	2014
Subjects:	Adhesion Low-k film Peel force Peel rate Tape test
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/84840
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Institution:	National University of Singapore

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