Double-layered vibratory grating scanners for high-speed high-resolution laser scanning

• Main Authors: Du, Y., Zhou, G., Cheo, K.L., Zhang, Q., Feng, H., Chau, F.S.
• 其他作者: MECHANICAL ENGINEERING
• 格式: Article
• 出版: 2014
• 主題: Diffraction grating; microoptoelectromechanical systems (MOEMS); microresonators; microscanners
• 在線閱讀: http://scholarbank.nus.edu.sg/handle/10635/85022

10.1109/JMEMS.2010.2067440