Micromachined vibratory diffraction grating scanner for multiwavelength collinear laser scanning

Micromachined vibratory diffraction grating scanner for multiwavelength collinear laser scanning

10.1109/JMEMS.2006.886027

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Bibliographic Details
Main Authors: Zhou, G., Chau, F.S.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
Subjects:
Diffraction grating
Micromirrors
Microscanners
Optical microelectromechanical systems (MEMS)
Online Access:http://scholarbank.nus.edu.sg/handle/10635/85407
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Institution: National University of Singapore
Description
Summary:10.1109/JMEMS.2006.886027

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