Micromachined vibratory diffraction grating scanner for multiwavelength collinear laser scanning

Micromachined vibratory diffraction grating scanner for multiwavelength collinear laser scanning

10.1109/JMEMS.2006.886027

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Bibliographic Details
Main Authors: Zhou, G., Chau, F.S.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
Subjects:
Diffraction grating
Micromirrors
Microscanners
Optical microelectromechanical systems (MEMS)
Online Access:http://scholarbank.nus.edu.sg/handle/10635/85407
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-854072023-10-25T20:17:02Z Micromachined vibratory diffraction grating scanner for multiwavelength collinear laser scanning Zhou, G. Chau, F.S. MECHANICAL ENGINEERING Diffraction grating Micromirrors Microscanners Optical microelectromechanical systems (MEMS) 10.1109/JMEMS.2006.886027 Journal of Microelectromechanical Systems 15 6 1777-1788 JMIYE 2014-10-07T09:07:40Z 2014-10-07T09:07:40Z 2006-12 Article Zhou, G., Chau, F.S. (2006-12). Micromachined vibratory diffraction grating scanner for multiwavelength collinear laser scanning. Journal of Microelectromechanical Systems 15 (6) : 1777-1788. ScholarBank@NUS Repository. https://doi.org/10.1109/JMEMS.2006.886027 10577157 http://scholarbank.nus.edu.sg/handle/10635/85407 000242983300039 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Diffraction grating
Micromirrors
Microscanners
Optical microelectromechanical systems (MEMS)
spellingShingle Diffraction grating
Micromirrors
Microscanners
Optical microelectromechanical systems (MEMS)
Zhou, G.
Chau, F.S.
Micromachined vibratory diffraction grating scanner for multiwavelength collinear laser scanning
description 10.1109/JMEMS.2006.886027
author2 MECHANICAL ENGINEERING
author_facet MECHANICAL ENGINEERING
Zhou, G.
Chau, F.S.
format Article
author Zhou, G.
Chau, F.S.
author_sort Zhou, G.
title Micromachined vibratory diffraction grating scanner for multiwavelength collinear laser scanning
title_short Micromachined vibratory diffraction grating scanner for multiwavelength collinear laser scanning
title_full Micromachined vibratory diffraction grating scanner for multiwavelength collinear laser scanning
title_fullStr Micromachined vibratory diffraction grating scanner for multiwavelength collinear laser scanning
title_full_unstemmed Micromachined vibratory diffraction grating scanner for multiwavelength collinear laser scanning
title_sort micromachined vibratory diffraction grating scanner for multiwavelength collinear laser scanning
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/85407
_version_ 1781784666880081920

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