Diffraction grating scanner using a micromachined resonator

Diffraction grating scanner using a micromachined resonator

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

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Bibliographic Details
Main Authors: Zhou, G., Logeeswaran, V.J., Tay, F.E.H., Chau, F.S.
Other Authors: MECHANICAL ENGINEERING
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/85925
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Institution: National University of Singapore
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Summary:Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

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