$Diffraction grating scanner using a micromachined resonator$

Diffraction grating scanner using a micromachined resonator

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

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Bibliographic Details
Main Authors:	Zhou, G., Logeeswaran, V.J., Tay, F.E.H., Chau, F.S.
Other Authors:	MECHANICAL ENGINEERING
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/85925
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Institution:	National University of Singapore

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