Diffraction grating scanner using a micromachined resonator
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
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2014
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sg-nus-scholar.10635-859252024-11-14T17:55:14Z Diffraction grating scanner using a micromachined resonator Zhou, G. Logeeswaran, V.J. Tay, F.E.H. Chau, F.S. MECHANICAL ENGINEERING Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 45-48 PMEME 2014-10-07T09:13:48Z 2014-10-07T09:13:48Z 2004 Conference Paper Zhou, G., Logeeswaran, V.J., Tay, F.E.H., Chau, F.S. (2004). Diffraction grating scanner using a micromachined resonator. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) : 45-48. ScholarBank@NUS Repository. 10846999 http://scholarbank.nus.edu.sg/handle/10635/85925 NOT_IN_WOS Scopus |
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National University of Singapore |
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NUS Library |
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Asia |
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Singapore Singapore |
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NUS Library |
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| description |
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) |
| author2 |
MECHANICAL ENGINEERING |
| author_facet |
MECHANICAL ENGINEERING Zhou, G. Logeeswaran, V.J. Tay, F.E.H. Chau, F.S. |
| format |
Conference or Workshop Item |
| author |
Zhou, G. Logeeswaran, V.J. Tay, F.E.H. Chau, F.S. |
| spellingShingle |
Zhou, G. Logeeswaran, V.J. Tay, F.E.H. Chau, F.S. Diffraction grating scanner using a micromachined resonator |
| author_sort |
Zhou, G. |
| title |
Diffraction grating scanner using a micromachined resonator |
| title_short |
Diffraction grating scanner using a micromachined resonator |
| title_full |
Diffraction grating scanner using a micromachined resonator |
| title_fullStr |
Diffraction grating scanner using a micromachined resonator |
| title_full_unstemmed |
Diffraction grating scanner using a micromachined resonator |
| title_sort |
diffraction grating scanner using a micromachined resonator |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/85925 |
| _version_ |
1821191552112787456 |