Effects of Si(001) surface amorphization on ErSi2 thin film

Effects of Si(001) surface amorphization on ErSi2 thin film

10.1016/j.tsf.2005.09.067

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Bibliographic Details
Main Authors: Tan, E.J., Kon, M.L., Pey, K.L., Lee, P.S., Zhang, Y.W., Wang, W.D., Chi, D.Z.
Other Authors: MATERIALS SCIENCE AND ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Amorphization
Erbium silicide
Morphology
Thin film
Online Access:http://scholarbank.nus.edu.sg/handle/10635/86878
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Institution: National University of Singapore
Description
Summary:10.1016/j.tsf.2005.09.067

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