Effects of Si(001) surface amorphization on ErSi2 thin film

• Main Authors: Tan, E.J., Kon, M.L., Pey, K.L., Lee, P.S., Zhang, Y.W., Wang, W.D., Chi, D.Z.
• Other Authors: MATERIALS SCIENCE AND ENGINEERING
• Format: Conference or Workshop Item
• Published: 2014
• Subjects: Amorphization; Erbium silicide; Morphology; Thin film
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/86878
• Institution: National University of Singapore

10.1016/j.tsf.2005.09.067