Bimodal distribution of damage morphology generated by ion implantation

10.1016/j.mseb.2005.08.099

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Bibliographic Details
Main Authors:	Mok, K.R.C., Jaraiz, M., Martin-Bragado, I., Rubio, J.E., Castrillo, P., Pinacho, R., Srinivasan, M.P., Benistant, F.
Other Authors:	CHEMICAL & BIOMOLECULAR ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Damage Implant temperature Ion-implant
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/90521
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-90521
record_format	dspace
spelling	sg-nus-scholar.10635-905212023-10-27T07:59:47Z Bimodal distribution of damage morphology generated by ion implantation Mok, K.R.C. Jaraiz, M. Martin-Bragado, I. Rubio, J.E. Castrillo, P. Pinacho, R. Srinivasan, M.P. Benistant, F. CHEMICAL & BIOMOLECULAR ENGINEERING Damage Implant temperature Ion-implant 10.1016/j.mseb.2005.08.099 Materials Science and Engineering B: Solid-State Materials for Advanced Technology 124-125 SUPPL. 389-391 MSBTE 2014-10-09T07:06:13Z 2014-10-09T07:06:13Z 2005-12-05 Conference Paper Mok, K.R.C., Jaraiz, M., Martin-Bragado, I., Rubio, J.E., Castrillo, P., Pinacho, R., Srinivasan, M.P., Benistant, F. (2005-12-05). Bimodal distribution of damage morphology generated by ion implantation. Materials Science and Engineering B: Solid-State Materials for Advanced Technology 124-125 (SUPPL.) : 389-391. ScholarBank@NUS Repository. https://doi.org/10.1016/j.mseb.2005.08.099 09215107 http://scholarbank.nus.edu.sg/handle/10635/90521 000233895800080 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Damage Implant temperature Ion-implant
spellingShingle	Damage Implant temperature Ion-implant Mok, K.R.C. Jaraiz, M. Martin-Bragado, I. Rubio, J.E. Castrillo, P. Pinacho, R. Srinivasan, M.P. Benistant, F. Bimodal distribution of damage morphology generated by ion implantation
description	10.1016/j.mseb.2005.08.099
author2	CHEMICAL & BIOMOLECULAR ENGINEERING
author_facet	CHEMICAL & BIOMOLECULAR ENGINEERING Mok, K.R.C. Jaraiz, M. Martin-Bragado, I. Rubio, J.E. Castrillo, P. Pinacho, R. Srinivasan, M.P. Benistant, F.
format	Conference or Workshop Item
author	Mok, K.R.C. Jaraiz, M. Martin-Bragado, I. Rubio, J.E. Castrillo, P. Pinacho, R. Srinivasan, M.P. Benistant, F.
author_sort	Mok, K.R.C.
title	Bimodal distribution of damage morphology generated by ion implantation
title_short	Bimodal distribution of damage morphology generated by ion implantation
title_full	Bimodal distribution of damage morphology generated by ion implantation
title_fullStr	Bimodal distribution of damage morphology generated by ion implantation
title_full_unstemmed	Bimodal distribution of damage morphology generated by ion implantation
title_sort	bimodal distribution of damage morphology generated by ion implantation
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/90521
_version_	1781785547789828096

Bimodal distribution of damage morphology generated by ion implantation

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