Ion-implant simulations: The effect of defect spatial correlation on damage accumulation
10.1016/j.mseb.2005.08.100
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2014
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| Online Access: | http://scholarbank.nus.edu.sg/handle/10635/90600 |
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sg-nus-scholar.10635-906002023-10-30T21:37:51Z Ion-implant simulations: The effect of defect spatial correlation on damage accumulation Mok, K.R.C. Jaraiz, M. Martin-Bragado, I. Rubio, J.E. Castrillo, P. Pinacho, R. Srinivasan, M.P. Benistant, F. CHEMICAL & BIOMOLECULAR ENGINEERING Crystal-amorphous Ion-implant simulation Spatial correlation 10.1016/j.mseb.2005.08.100 Materials Science and Engineering B: Solid-State Materials for Advanced Technology 124-125 SUPPL. 386-388 MSBTE 2014-10-09T07:07:03Z 2014-10-09T07:07:03Z 2005-12-05 Conference Paper Mok, K.R.C., Jaraiz, M., Martin-Bragado, I., Rubio, J.E., Castrillo, P., Pinacho, R., Srinivasan, M.P., Benistant, F. (2005-12-05). Ion-implant simulations: The effect of defect spatial correlation on damage accumulation. Materials Science and Engineering B: Solid-State Materials for Advanced Technology 124-125 (SUPPL.) : 386-388. ScholarBank@NUS Repository. https://doi.org/10.1016/j.mseb.2005.08.100 09215107 http://scholarbank.nus.edu.sg/handle/10635/90600 000233895800079 Scopus |
| institution |
National University of Singapore |
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NUS Library |
| continent |
Asia |
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Singapore Singapore |
| content_provider |
NUS Library |
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ScholarBank@NUS |
| topic |
Crystal-amorphous Ion-implant simulation Spatial correlation |
| spellingShingle |
Crystal-amorphous Ion-implant simulation Spatial correlation Mok, K.R.C. Jaraiz, M. Martin-Bragado, I. Rubio, J.E. Castrillo, P. Pinacho, R. Srinivasan, M.P. Benistant, F. Ion-implant simulations: The effect of defect spatial correlation on damage accumulation |
| description |
10.1016/j.mseb.2005.08.100 |
| author2 |
CHEMICAL & BIOMOLECULAR ENGINEERING |
| author_facet |
CHEMICAL & BIOMOLECULAR ENGINEERING Mok, K.R.C. Jaraiz, M. Martin-Bragado, I. Rubio, J.E. Castrillo, P. Pinacho, R. Srinivasan, M.P. Benistant, F. |
| format |
Conference or Workshop Item |
| author |
Mok, K.R.C. Jaraiz, M. Martin-Bragado, I. Rubio, J.E. Castrillo, P. Pinacho, R. Srinivasan, M.P. Benistant, F. |
| author_sort |
Mok, K.R.C. |
| title |
Ion-implant simulations: The effect of defect spatial correlation on damage accumulation |
| title_short |
Ion-implant simulations: The effect of defect spatial correlation on damage accumulation |
| title_full |
Ion-implant simulations: The effect of defect spatial correlation on damage accumulation |
| title_fullStr |
Ion-implant simulations: The effect of defect spatial correlation on damage accumulation |
| title_full_unstemmed |
Ion-implant simulations: The effect of defect spatial correlation on damage accumulation |
| title_sort |
ion-implant simulations: the effect of defect spatial correlation on damage accumulation |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/90600 |
| _version_ |
1781785550471036928 |