Phosphorus implant for S/D extension formation: Diffusion and activation study after spacer and spike anneal

AIP Conference Proceedings

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Bibliographic Details
Main Authors:	Yeong, S.H., Colombeau, B., Benistant, F., Srinivasan, M.P., Mulcahy, C.P.A., Lee, P.S., Chan, L.
Other Authors:	CHEMICAL & BIOMOLECULAR ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Ge-pai Halo implant Phosphorus Spacer anneal SPER Spike anneal
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/90681
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-90681
record_format	dspace
spelling	sg-nus-scholar.10635-906812015-01-09T11:54:23Z Phosphorus implant for S/D extension formation: Diffusion and activation study after spacer and spike anneal Yeong, S.H. Colombeau, B. Benistant, F. Srinivasan, M.P. Mulcahy, C.P.A. Lee, P.S. Chan, L. CHEMICAL & BIOMOLECULAR ENGINEERING Ge-pai Halo implant Phosphorus Spacer anneal SPER Spike anneal AIP Conference Proceedings 866 58-61 2014-10-09T07:07:59Z 2014-10-09T07:07:59Z 2006 Conference Paper Yeong, S.H.,Colombeau, B.,Benistant, F.,Srinivasan, M.P.,Mulcahy, C.P.A.,Lee, P.S.,Chan, L. (2006). Phosphorus implant for S/D extension formation: Diffusion and activation study after spacer and spike anneal. AIP Conference Proceedings 866 : 58-61. ScholarBank@NUS Repository. 0735403651 0094243X http://scholarbank.nus.edu.sg/handle/10635/90681 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
topic	Ge-pai Halo implant Phosphorus Spacer anneal SPER Spike anneal
spellingShingle	Ge-pai Halo implant Phosphorus Spacer anneal SPER Spike anneal Yeong, S.H. Colombeau, B. Benistant, F. Srinivasan, M.P. Mulcahy, C.P.A. Lee, P.S. Chan, L. Phosphorus implant for S/D extension formation: Diffusion and activation study after spacer and spike anneal
description	AIP Conference Proceedings
author2	CHEMICAL & BIOMOLECULAR ENGINEERING
author_facet	CHEMICAL & BIOMOLECULAR ENGINEERING Yeong, S.H. Colombeau, B. Benistant, F. Srinivasan, M.P. Mulcahy, C.P.A. Lee, P.S. Chan, L.
format	Conference or Workshop Item
author	Yeong, S.H. Colombeau, B. Benistant, F. Srinivasan, M.P. Mulcahy, C.P.A. Lee, P.S. Chan, L.
author_sort	Yeong, S.H.
title	Phosphorus implant for S/D extension formation: Diffusion and activation study after spacer and spike anneal
title_short	Phosphorus implant for S/D extension formation: Diffusion and activation study after spacer and spike anneal
title_full	Phosphorus implant for S/D extension formation: Diffusion and activation study after spacer and spike anneal
title_fullStr	Phosphorus implant for S/D extension formation: Diffusion and activation study after spacer and spike anneal
title_full_unstemmed	Phosphorus implant for S/D extension formation: Diffusion and activation study after spacer and spike anneal
title_sort	phosphorus implant for s/d extension formation: diffusion and activation study after spacer and spike anneal
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/90681
_version_	1681090635612815360

Phosphorus implant for S/D extension formation: Diffusion and activation study after spacer and spike anneal

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