Applications of micro-Raman spectroscopy in salicide characterization for Si device fabrication

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

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Bibliographic Details
Main Authors:	Zhao, F.F., Chen, S.Y., Shen, Z.X., Gao, X.S., Zheng, J.Z., See, A.K., Chan, L.H.
Other Authors:	MATERIALS SCIENCE
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/95812
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-95812
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spelling	sg-nus-scholar.10635-958122015-01-16T12:05:44Z Applications of micro-Raman spectroscopy in salicide characterization for Si device fabrication Zhao, F.F. Chen, S.Y. Shen, Z.X. Gao, X.S. Zheng, J.Z. See, A.K. Chan, L.H. MATERIALS SCIENCE PHYSICS Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 21 2 862-867 JVTBD 2014-10-16T09:16:06Z 2014-10-16T09:16:06Z 2003-03 Article Zhao, F.F.,Chen, S.Y.,Shen, Z.X.,Gao, X.S.,Zheng, J.Z.,See, A.K.,Chan, L.H. (2003-03). Applications of micro-Raman spectroscopy in salicide characterization for Si device fabrication. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 21 (2) : 862-867. ScholarBank@NUS Repository. 10711023 http://scholarbank.nus.edu.sg/handle/10635/95812 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
author2	MATERIALS SCIENCE
author_facet	MATERIALS SCIENCE Zhao, F.F. Chen, S.Y. Shen, Z.X. Gao, X.S. Zheng, J.Z. See, A.K. Chan, L.H.
format	Article
author	Zhao, F.F. Chen, S.Y. Shen, Z.X. Gao, X.S. Zheng, J.Z. See, A.K. Chan, L.H.
spellingShingle	Zhao, F.F. Chen, S.Y. Shen, Z.X. Gao, X.S. Zheng, J.Z. See, A.K. Chan, L.H. Applications of micro-Raman spectroscopy in salicide characterization for Si device fabrication
author_sort	Zhao, F.F.
title	Applications of micro-Raman spectroscopy in salicide characterization for Si device fabrication
title_short	Applications of micro-Raman spectroscopy in salicide characterization for Si device fabrication
title_full	Applications of micro-Raman spectroscopy in salicide characterization for Si device fabrication
title_fullStr	Applications of micro-Raman spectroscopy in salicide characterization for Si device fabrication
title_full_unstemmed	Applications of micro-Raman spectroscopy in salicide characterization for Si device fabrication
title_sort	applications of micro-raman spectroscopy in salicide characterization for si device fabrication
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/95812
_version_	1681091546109181952

Applications of micro-Raman spectroscopy in salicide characterization for Si device fabrication

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