Applications of micro-Raman spectroscopy in salicide characterization for Si device fabrication
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Saved in:
Main Authors: | Zhao, F.F., Chen, S.Y., Shen, Z.X., Gao, X.S., Zheng, J.Z., See, A.K., Chan, L.H. |
---|---|
Other Authors: | MATERIALS SCIENCE |
Format: | Article |
Published: |
2014
|
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/95812 |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Institution: | National University of Singapore |
Similar Items
-
Raman spectroscopy of epitaxial graphene on a SiC substrate
by: Ni, Z.H., et al.
Published: (2014) -
Approach to interface roughness of silicide thin films by micro-Raman imaging
by: Zhao, F.F., et al.
Published: (2014) -
Micro-Raman spectroscopy investigation of nickel silicides and nickel (platinum) silicides
by: Lee, P.S., et al.
Published: (2014) -
Analysis of the degree of conversion of LED and halogen lights using micro-raman spectroscopy
by: Soh, M.S., et al.
Published: (2014) -
Structural transformation studies of AgNO3 by Raman and infrared spectroscopy
by: Shen, Z.X., et al.
Published: (2014)