Characterization of thick graded Si1-xGex/Si layers grown by low energy plasma enhanced chemical vapour deposition
10.1016/S0168-583X(03)01820-2
Saved in:
| Main Authors: | , , , , |
|---|---|
| Other Authors: | |
| Format: | Article |
| Published: |
2014
|
| Subjects: | |
| Online Access: | http://scholarbank.nus.edu.sg/handle/10635/95969 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Institution: | National University of Singapore |
| id |
sg-nus-scholar.10635-95969 |
|---|---|
| record_format |
dspace |
| spelling |
sg-nus-scholar.10635-959692023-10-27T07:30:52Z Characterization of thick graded Si1-xGex/Si layers grown by low energy plasma enhanced chemical vapour deposition Seng, H.L. Breese, M.B.H. Watt, F. Kummer, M. Von Känel, H. PHYSICS Beam bending Graded silicon-germanium Ion channeling LEPECVD 10.1016/S0168-583X(03)01820-2 Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 215 1-2 235-239 NIMBE 2014-10-16T09:17:57Z 2014-10-16T09:17:57Z 2004-01 Article Seng, H.L., Breese, M.B.H., Watt, F., Kummer, M., Von Känel, H. (2004-01). Characterization of thick graded Si1-xGex/Si layers grown by low energy plasma enhanced chemical vapour deposition. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 215 (1-2) : 235-239. ScholarBank@NUS Repository. https://doi.org/10.1016/S0168-583X(03)01820-2 0168583X http://scholarbank.nus.edu.sg/handle/10635/95969 000188400400030 Scopus |
| institution |
National University of Singapore |
| building |
NUS Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| topic |
Beam bending Graded silicon-germanium Ion channeling LEPECVD |
| spellingShingle |
Beam bending Graded silicon-germanium Ion channeling LEPECVD Seng, H.L. Breese, M.B.H. Watt, F. Kummer, M. Von Känel, H. Characterization of thick graded Si1-xGex/Si layers grown by low energy plasma enhanced chemical vapour deposition |
| description |
10.1016/S0168-583X(03)01820-2 |
| author2 |
PHYSICS |
| author_facet |
PHYSICS Seng, H.L. Breese, M.B.H. Watt, F. Kummer, M. Von Känel, H. |
| format |
Article |
| author |
Seng, H.L. Breese, M.B.H. Watt, F. Kummer, M. Von Känel, H. |
| author_sort |
Seng, H.L. |
| title |
Characterization of thick graded Si1-xGex/Si layers grown by low energy plasma enhanced chemical vapour deposition |
| title_short |
Characterization of thick graded Si1-xGex/Si layers grown by low energy plasma enhanced chemical vapour deposition |
| title_full |
Characterization of thick graded Si1-xGex/Si layers grown by low energy plasma enhanced chemical vapour deposition |
| title_fullStr |
Characterization of thick graded Si1-xGex/Si layers grown by low energy plasma enhanced chemical vapour deposition |
| title_full_unstemmed |
Characterization of thick graded Si1-xGex/Si layers grown by low energy plasma enhanced chemical vapour deposition |
| title_sort |
characterization of thick graded si1-xgex/si layers grown by low energy plasma enhanced chemical vapour deposition |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/95969 |
| _version_ |
1781786362033209344 |