Characterization of thick graded Si1-xGex/Si layers grown by low energy plasma enhanced chemical vapour deposition
10.1016/S0168-583X(03)01820-2
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Main Authors: | Seng, H.L., Breese, M.B.H., Watt, F., Kummer, M., Von Känel, H. |
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Other Authors: | PHYSICS |
Format: | Article |
Published: |
2014
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Subjects: | |
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/95969 |
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Institution: | National University of Singapore |
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