Effect of exposure to air on sheet resistance and phase composition of Co silicides annealed at a low temperature of 470°C

Effect of exposure to air on sheet resistance and phase composition of Co silicides annealed at a low temperature of 470°C

10.1007/s00339-002-1911-9

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Bibliographic Details
Main Authors: Huang, Q., Tan, A.S., Tan, J.M., Goh, I.S., Dong, Z.Z., Ong, C.K., Osipowicz, T.
Other Authors: PHYSICS
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/96302
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Institution: National University of Singapore
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Summary:10.1007/s00339-002-1911-9

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