Effect of exposure to air on sheet resistance and phase composition of Co silicides annealed at a low temperature of 470°C

• Main Authors: Huang, Q., Tan, A.S., Tan, J.M., Goh, I.S., Dong, Z.Z., Ong, C.K., Osipowicz, T.
• Other Authors: PHYSICS
• Format: Article
• Published: 2014
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/96302
• Institution: National University of Singapore

10.1007/s00339-002-1911-9