Effect of exposure to air on sheet resistance and phase composition of Co silicides annealed at a low temperature of 470°C
10.1007/s00339-002-1911-9
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2014
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sg-nus-scholar.10635-963022023-10-25T07:33:43Z Effect of exposure to air on sheet resistance and phase composition of Co silicides annealed at a low temperature of 470°C Huang, Q. Tan, A.S. Tan, J.M. Goh, I.S. Dong, Z.Z. Ong, C.K. Osipowicz, T. PHYSICS 10.1007/s00339-002-1911-9 Applied Physics A: Materials Science and Processing 76 3 439-443 APAMF 2014-10-16T09:21:51Z 2014-10-16T09:21:51Z 2003-03 Article Huang, Q., Tan, A.S., Tan, J.M., Goh, I.S., Dong, Z.Z., Ong, C.K., Osipowicz, T. (2003-03). Effect of exposure to air on sheet resistance and phase composition of Co silicides annealed at a low temperature of 470°C. Applied Physics A: Materials Science and Processing 76 (3) : 439-443. ScholarBank@NUS Repository. https://doi.org/10.1007/s00339-002-1911-9 09478396 http://scholarbank.nus.edu.sg/handle/10635/96302 000179782100024 Scopus |
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National University of Singapore |
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Singapore Singapore |
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10.1007/s00339-002-1911-9 |
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PHYSICS |
| author_facet |
PHYSICS Huang, Q. Tan, A.S. Tan, J.M. Goh, I.S. Dong, Z.Z. Ong, C.K. Osipowicz, T. |
| format |
Article |
| author |
Huang, Q. Tan, A.S. Tan, J.M. Goh, I.S. Dong, Z.Z. Ong, C.K. Osipowicz, T. |
| spellingShingle |
Huang, Q. Tan, A.S. Tan, J.M. Goh, I.S. Dong, Z.Z. Ong, C.K. Osipowicz, T. Effect of exposure to air on sheet resistance and phase composition of Co silicides annealed at a low temperature of 470°C |
| author_sort |
Huang, Q. |
| title |
Effect of exposure to air on sheet resistance and phase composition of Co silicides annealed at a low temperature of 470°C |
| title_short |
Effect of exposure to air on sheet resistance and phase composition of Co silicides annealed at a low temperature of 470°C |
| title_full |
Effect of exposure to air on sheet resistance and phase composition of Co silicides annealed at a low temperature of 470°C |
| title_fullStr |
Effect of exposure to air on sheet resistance and phase composition of Co silicides annealed at a low temperature of 470°C |
| title_full_unstemmed |
Effect of exposure to air on sheet resistance and phase composition of Co silicides annealed at a low temperature of 470°C |
| title_sort |
effect of exposure to air on sheet resistance and phase composition of co silicides annealed at a low temperature of 470°c |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/96302 |
| _version_ |
1781786428265463808 |