Effect of thermal annealing on reactive radio-frequency magnetron-sputtered carbon nitride films
10.1088/0022-3727/32/3/003
Saved in:
| Main Authors: | , , , , |
|---|---|
| Other Authors: | |
| Format: | Article |
| Published: |
2014
|
| Online Access: | http://scholarbank.nus.edu.sg/handle/10635/96344 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Institution: | National University of Singapore |
| id |
sg-nus-scholar.10635-96344 |
|---|---|
| record_format |
dspace |
| spelling |
sg-nus-scholar.10635-963442023-10-30T22:44:06Z Effect of thermal annealing on reactive radio-frequency magnetron-sputtered carbon nitride films Chen, G.L. Li, Y. Lin, J. Huan, C.H.A. Guo, Y.P. PHYSICS MATERIALS SCIENCE 10.1088/0022-3727/32/3/003 Journal of Physics D: Applied Physics 32 3 195-199 JPAPB 2014-10-16T09:22:21Z 2014-10-16T09:22:21Z 1999-02-07 Article Chen, G.L., Li, Y., Lin, J., Huan, C.H.A., Guo, Y.P. (1999-02-07). Effect of thermal annealing on reactive radio-frequency magnetron-sputtered carbon nitride films. Journal of Physics D: Applied Physics 32 (3) : 195-199. ScholarBank@NUS Repository. https://doi.org/10.1088/0022-3727/32/3/003 00223727 http://scholarbank.nus.edu.sg/handle/10635/96344 000078628800003 Scopus |
| institution |
National University of Singapore |
| building |
NUS Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| description |
10.1088/0022-3727/32/3/003 |
| author2 |
PHYSICS |
| author_facet |
PHYSICS Chen, G.L. Li, Y. Lin, J. Huan, C.H.A. Guo, Y.P. |
| format |
Article |
| author |
Chen, G.L. Li, Y. Lin, J. Huan, C.H.A. Guo, Y.P. |
| spellingShingle |
Chen, G.L. Li, Y. Lin, J. Huan, C.H.A. Guo, Y.P. Effect of thermal annealing on reactive radio-frequency magnetron-sputtered carbon nitride films |
| author_sort |
Chen, G.L. |
| title |
Effect of thermal annealing on reactive radio-frequency magnetron-sputtered carbon nitride films |
| title_short |
Effect of thermal annealing on reactive radio-frequency magnetron-sputtered carbon nitride films |
| title_full |
Effect of thermal annealing on reactive radio-frequency magnetron-sputtered carbon nitride films |
| title_fullStr |
Effect of thermal annealing on reactive radio-frequency magnetron-sputtered carbon nitride films |
| title_full_unstemmed |
Effect of thermal annealing on reactive radio-frequency magnetron-sputtered carbon nitride films |
| title_sort |
effect of thermal annealing on reactive radio-frequency magnetron-sputtered carbon nitride films |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/96344 |
| _version_ |
1781786436157046784 |