Effect of thermal annealing on reactive radio-frequency magnetron-sputtered carbon nitride films

10.1088/0022-3727/32/3/003

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Bibliographic Details
Main Authors:	Chen, G.L., Li, Y., Lin, J., Huan, C.H.A., Guo, Y.P.
Other Authors:	PHYSICS
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/96344
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Institution:	National University of Singapore

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