Effects of prolonged annealing on NiSi at low temperature (500°C)

Journal of Electronic Materials

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Main Authors: Anisur, M.R., Osipowicz, T., Chi, D.Z., Wang, W.D.
Other Authors: PHYSICS
Format: Article
Published: 2014
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Online Access:http://scholarbank.nus.edu.sg/handle/10635/96376
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-963762024-11-08T20:20:05Z Effects of prolonged annealing on NiSi at low temperature (500°C) Anisur, M.R. Osipowicz, T. Chi, D.Z. Wang, W.D. PHYSICS Agglomeration Interface roughness Nickel monosilicide (NiSi) Prolonged annealing Thermal stability Journal of Electronic Materials 34 8 1110-1114 JECMA 2014-10-16T09:22:43Z 2014-10-16T09:22:43Z 2005-08 Article Anisur, M.R.,Osipowicz, T.,Chi, D.Z.,Wang, W.D. (2005-08). Effects of prolonged annealing on NiSi at low temperature (500°C). Journal of Electronic Materials 34 (8) : 1110-1114. ScholarBank@NUS Repository. 03615235 http://scholarbank.nus.edu.sg/handle/10635/96376 NOT_IN_WOS Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Agglomeration
Interface roughness
Nickel monosilicide (NiSi)
Prolonged annealing
Thermal stability
spellingShingle Agglomeration
Interface roughness
Nickel monosilicide (NiSi)
Prolonged annealing
Thermal stability
Anisur, M.R.
Osipowicz, T.
Chi, D.Z.
Wang, W.D.
Effects of prolonged annealing on NiSi at low temperature (500°C)
description Journal of Electronic Materials
author2 PHYSICS
author_facet PHYSICS
Anisur, M.R.
Osipowicz, T.
Chi, D.Z.
Wang, W.D.
format Article
author Anisur, M.R.
Osipowicz, T.
Chi, D.Z.
Wang, W.D.
author_sort Anisur, M.R.
title Effects of prolonged annealing on NiSi at low temperature (500°C)
title_short Effects of prolonged annealing on NiSi at low temperature (500°C)
title_full Effects of prolonged annealing on NiSi at low temperature (500°C)
title_fullStr Effects of prolonged annealing on NiSi at low temperature (500°C)
title_full_unstemmed Effects of prolonged annealing on NiSi at low temperature (500°C)
title_sort effects of prolonged annealing on nisi at low temperature (500°c)
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/96376
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