Interface strain study of thin Lu2O3/Si using HRBS

10.1016/j.nimb.2007.12.090

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Bibliographic Details
Main Authors:	Chan, T.K., Darmawan, P., Ho, C.S., Malar, P., Lee, P.S., Osipowicz, T.
Other Authors:	PHYSICS
Format:	Article
Published:	2014
Subjects:	61.85.+p 68.49.-h 68.55.aj Channeling High-resolution RBS Interfacial strain Lu2O3 thin films
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/96960
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-96960
record_format	dspace
spelling	sg-nus-scholar.10635-969602023-10-30T22:48:46Z Interface strain study of thin Lu2O3/Si using HRBS Chan, T.K. Darmawan, P. Ho, C.S. Malar, P. Lee, P.S. Osipowicz, T. PHYSICS 61.85.+p 68.49.-h 68.55.aj Channeling High-resolution RBS Interfacial strain Lu2O3 thin films 10.1016/j.nimb.2007.12.090 Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 266 8 1486-1489 NIMBE 2014-10-16T09:29:38Z 2014-10-16T09:29:38Z 2008-04 Article Chan, T.K., Darmawan, P., Ho, C.S., Malar, P., Lee, P.S., Osipowicz, T. (2008-04). Interface strain study of thin Lu2O3/Si using HRBS. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 266 (8) : 1486-1489. ScholarBank@NUS Repository. https://doi.org/10.1016/j.nimb.2007.12.090 0168583X http://scholarbank.nus.edu.sg/handle/10635/96960 000256677600071 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	61.85.+p 68.49.-h 68.55.aj Channeling High-resolution RBS Interfacial strain Lu2O3 thin films
spellingShingle	61.85.+p 68.49.-h 68.55.aj Channeling High-resolution RBS Interfacial strain Lu2O3 thin films Chan, T.K. Darmawan, P. Ho, C.S. Malar, P. Lee, P.S. Osipowicz, T. Interface strain study of thin Lu2O3/Si using HRBS
description	10.1016/j.nimb.2007.12.090
author2	PHYSICS
author_facet	PHYSICS Chan, T.K. Darmawan, P. Ho, C.S. Malar, P. Lee, P.S. Osipowicz, T.
format	Article
author	Chan, T.K. Darmawan, P. Ho, C.S. Malar, P. Lee, P.S. Osipowicz, T.
author_sort	Chan, T.K.
title	Interface strain study of thin Lu2O3/Si using HRBS
title_short	Interface strain study of thin Lu2O3/Si using HRBS
title_full	Interface strain study of thin Lu2O3/Si using HRBS
title_fullStr	Interface strain study of thin Lu2O3/Si using HRBS
title_full_unstemmed	Interface strain study of thin Lu2O3/Si using HRBS
title_sort	interface strain study of thin lu2o3/si using hrbs
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/96960
_version_	1781786575998287872

Interface strain study of thin Lu2O3/Si using HRBS

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