Three-dimensional micromachining of silicon using a nuclear microprobe

10.1016/j.nimb.2004.04.159

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Bibliographic Details
Main Authors:	Teo, E.J., Tavernier, E.P., Breese, M.B.H., Bettiol, A.A., Watt, F., Liu, M.H., Blackwood, D.J.
Other Authors:	PHYSICS
Format:	Article
Published:	2014
Subjects:	Electrochemical etching Porous silicon Proton beam writing Silicon micromachining
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/98399
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-98399
record_format	dspace
spelling	sg-nus-scholar.10635-983992024-11-14T18:39:18Z Three-dimensional micromachining of silicon using a nuclear microprobe Teo, E.J. Tavernier, E.P. Breese, M.B.H. Bettiol, A.A. Watt, F. Liu, M.H. Blackwood, D.J. PHYSICS MATERIALS SCIENCE Electrochemical etching Porous silicon Proton beam writing Silicon micromachining 10.1016/j.nimb.2004.04.159 Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 222 3-4 513-517 NIMBE 2014-10-16T09:46:38Z 2014-10-16T09:46:38Z 2004-08 Article Teo, E.J., Tavernier, E.P., Breese, M.B.H., Bettiol, A.A., Watt, F., Liu, M.H., Blackwood, D.J. (2004-08). Three-dimensional micromachining of silicon using a nuclear microprobe. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 222 (3-4) : 513-517. ScholarBank@NUS Repository. https://doi.org/10.1016/j.nimb.2004.04.159 0168583X http://scholarbank.nus.edu.sg/handle/10635/98399 000223121800020 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Electrochemical etching Porous silicon Proton beam writing Silicon micromachining
spellingShingle	Electrochemical etching Porous silicon Proton beam writing Silicon micromachining Teo, E.J. Tavernier, E.P. Breese, M.B.H. Bettiol, A.A. Watt, F. Liu, M.H. Blackwood, D.J. Three-dimensional micromachining of silicon using a nuclear microprobe
description	10.1016/j.nimb.2004.04.159
author2	PHYSICS
author_facet	PHYSICS Teo, E.J. Tavernier, E.P. Breese, M.B.H. Bettiol, A.A. Watt, F. Liu, M.H. Blackwood, D.J.
format	Article
author	Teo, E.J. Tavernier, E.P. Breese, M.B.H. Bettiol, A.A. Watt, F. Liu, M.H. Blackwood, D.J.
author_sort	Teo, E.J.
title	Three-dimensional micromachining of silicon using a nuclear microprobe
title_short	Three-dimensional micromachining of silicon using a nuclear microprobe
title_full	Three-dimensional micromachining of silicon using a nuclear microprobe
title_fullStr	Three-dimensional micromachining of silicon using a nuclear microprobe
title_full_unstemmed	Three-dimensional micromachining of silicon using a nuclear microprobe
title_sort	three-dimensional micromachining of silicon using a nuclear microprobe
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/98399
_version_	1821232684228149248

Three-dimensional micromachining of silicon using a nuclear microprobe

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