Three-dimensional micromachining of silicon using a nuclear microprobe

Three-dimensional micromachining of silicon using a nuclear microprobe

10.1016/j.nimb.2004.04.159

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Bibliographic Details
Main Authors: Teo, E.J., Tavernier, E.P., Breese, M.B.H., Bettiol, A.A., Watt, F., Liu, M.H., Blackwood, D.J.
Other Authors: MATERIALS SCIENCE
Format: Article
Published: 2014
Subjects:
Electrochemical etching
Porous silicon
Proton beam writing
Silicon micromachining
Online Access:http://scholarbank.nus.edu.sg/handle/10635/98399
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Institution: National University of Singapore

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http://scholarbank.nus.edu.sg/handle/10635/98399

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