Three-dimensional micromachining of silicon using a nuclear microprobe

• Main Authors: Teo, E.J., Tavernier, E.P., Breese, M.B.H., Bettiol, A.A., Watt, F., Liu, M.H., Blackwood, D.J.
• Other Authors: MATERIALS SCIENCE
• Format: Article
• Published: 2014
• Subjects: Electrochemical etching; Porous silicon; Proton beam writing; Silicon micromachining
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/98399
• Institution: National University of Singapore

10.1016/j.nimb.2004.04.159