An all-silicon channel waveguide fabricated using direct proton beam writing

• Main Authors: Teo, E.J., Bettiol, A.A., Breese, M.B.H., Yang, P.Y., Mashanovich, G.Z., Headley, W.R., Reed, G.T., Blackwood, D.J.
• Other Authors: PHYSICS
• Format: Conference or Workshop Item
• Published: 2014
• Subjects: Porous silicon; Proton beam writing; Silicon photonics; Waveguides
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/98634
• Institution: National University of Singapore

10.1117/12.762771