An all-silicon channel waveguide fabricated using direct proton beam writing
10.1117/12.762771
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Main Authors: | Teo, E.J., Bettiol, A.A., Breese, M.B.H., Yang, P.Y., Mashanovich, G.Z., Headley, W.R., Reed, G.T., Blackwood, D.J. |
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Other Authors: | PHYSICS |
Format: | Conference or Workshop Item |
Published: |
2014
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Subjects: | |
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/98634 |
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Institution: | National University of Singapore |
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