An all-silicon channel waveguide fabricated using direct proton beam writing

10.1117/12.762771

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Bibliographic Details
Main Authors:	Teo, E.J., Bettiol, A.A., Breese, M.B.H., Yang, P.Y., Mashanovich, G.Z., Headley, W.R., Reed, G.T., Blackwood, D.J.
Other Authors:	PHYSICS
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Porous silicon Proton beam writing Silicon photonics Waveguides
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/98634
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-98634
record_format	dspace
spelling	sg-nus-scholar.10635-986342023-10-26T21:22:38Z An all-silicon channel waveguide fabricated using direct proton beam writing Teo, E.J. Bettiol, A.A. Breese, M.B.H. Yang, P.Y. Mashanovich, G.Z. Headley, W.R. Reed, G.T. Blackwood, D.J. PHYSICS Porous silicon Proton beam writing Silicon photonics Waveguides 10.1117/12.762771 Proceedings of SPIE - The International Society for Optical Engineering 6898 - PSISD 2014-10-16T09:49:33Z 2014-10-16T09:49:33Z 2008 Conference Paper Teo, E.J., Bettiol, A.A., Breese, M.B.H., Yang, P.Y., Mashanovich, G.Z., Headley, W.R., Reed, G.T., Blackwood, D.J. (2008). An all-silicon channel waveguide fabricated using direct proton beam writing. Proceedings of SPIE - The International Society for Optical Engineering 6898 : -. ScholarBank@NUS Repository. https://doi.org/10.1117/12.762771 9780819470737 0277786X http://scholarbank.nus.edu.sg/handle/10635/98634 000254508600021 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Porous silicon Proton beam writing Silicon photonics Waveguides
spellingShingle	Porous silicon Proton beam writing Silicon photonics Waveguides Teo, E.J. Bettiol, A.A. Breese, M.B.H. Yang, P.Y. Mashanovich, G.Z. Headley, W.R. Reed, G.T. Blackwood, D.J. An all-silicon channel waveguide fabricated using direct proton beam writing
description	10.1117/12.762771
author2	PHYSICS
author_facet	PHYSICS Teo, E.J. Bettiol, A.A. Breese, M.B.H. Yang, P.Y. Mashanovich, G.Z. Headley, W.R. Reed, G.T. Blackwood, D.J.
format	Conference or Workshop Item
author	Teo, E.J. Bettiol, A.A. Breese, M.B.H. Yang, P.Y. Mashanovich, G.Z. Headley, W.R. Reed, G.T. Blackwood, D.J.
author_sort	Teo, E.J.
title	An all-silicon channel waveguide fabricated using direct proton beam writing
title_short	An all-silicon channel waveguide fabricated using direct proton beam writing
title_full	An all-silicon channel waveguide fabricated using direct proton beam writing
title_fullStr	An all-silicon channel waveguide fabricated using direct proton beam writing
title_full_unstemmed	An all-silicon channel waveguide fabricated using direct proton beam writing
title_sort	all-silicon channel waveguide fabricated using direct proton beam writing
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/98634
_version_	1781786920456552448

An all-silicon channel waveguide fabricated using direct proton beam writing

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