Determination of local lattice tilt in Si1-xGex virtual substrate using high resolution channeling contrast microscopy
10.1016/j.nimb.2005.01.098
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2014
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sg-nus-scholar.10635-986652023-10-26T21:22:27Z Determination of local lattice tilt in Si1-xGex virtual substrate using high resolution channeling contrast microscopy Seng, H.L. Osipowicz, T. Zhang, J. Tok, E.S. Watt, F. PHYSICS MATERIALS SCIENCE Channeling contrast microscopy SiGe Virtual substrate 10.1016/j.nimb.2005.01.098 Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 231 1-4 446-451 NIMBE 2014-10-16T09:49:57Z 2014-10-16T09:49:57Z 2005-04 Conference Paper Seng, H.L., Osipowicz, T., Zhang, J., Tok, E.S., Watt, F. (2005-04). Determination of local lattice tilt in Si1-xGex virtual substrate using high resolution channeling contrast microscopy. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 231 (1-4) : 446-451. ScholarBank@NUS Repository. https://doi.org/10.1016/j.nimb.2005.01.098 0168583X http://scholarbank.nus.edu.sg/handle/10635/98665 000229752400075 Scopus |
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National University of Singapore |
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NUS Library |
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Asia |
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Singapore Singapore |
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NUS Library |
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Channeling contrast microscopy SiGe Virtual substrate |
| spellingShingle |
Channeling contrast microscopy SiGe Virtual substrate Seng, H.L. Osipowicz, T. Zhang, J. Tok, E.S. Watt, F. Determination of local lattice tilt in Si1-xGex virtual substrate using high resolution channeling contrast microscopy |
| description |
10.1016/j.nimb.2005.01.098 |
| author2 |
PHYSICS |
| author_facet |
PHYSICS Seng, H.L. Osipowicz, T. Zhang, J. Tok, E.S. Watt, F. |
| format |
Conference or Workshop Item |
| author |
Seng, H.L. Osipowicz, T. Zhang, J. Tok, E.S. Watt, F. |
| author_sort |
Seng, H.L. |
| title |
Determination of local lattice tilt in Si1-xGex virtual substrate using high resolution channeling contrast microscopy |
| title_short |
Determination of local lattice tilt in Si1-xGex virtual substrate using high resolution channeling contrast microscopy |
| title_full |
Determination of local lattice tilt in Si1-xGex virtual substrate using high resolution channeling contrast microscopy |
| title_fullStr |
Determination of local lattice tilt in Si1-xGex virtual substrate using high resolution channeling contrast microscopy |
| title_full_unstemmed |
Determination of local lattice tilt in Si1-xGex virtual substrate using high resolution channeling contrast microscopy |
| title_sort |
determination of local lattice tilt in si1-xgex virtual substrate using high resolution channeling contrast microscopy |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/98665 |
| _version_ |
1781786926543536128 |