Determination of local lattice tilt in Si1-xGex virtual substrate using high resolution channeling contrast microscopy

Determination of local lattice tilt in Si1-xGex virtual substrate using high resolution channeling contrast microscopy

10.1016/j.nimb.2005.01.098

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Bibliographic Details
Main Authors: Seng, H.L., Osipowicz, T., Zhang, J., Tok, E.S., Watt, F.
Other Authors: PHYSICS
Format: Conference or Workshop Item
Published: 2014
Subjects:
Channeling contrast microscopy
SiGe
Virtual substrate
Online Access:http://scholarbank.nus.edu.sg/handle/10635/98665
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Institution: National University of Singapore

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