Formation of ultra-shallow p +/n junctions in silicon-on-insulator (SOI) substrate using laser annealing
10.1016/j.mseb.2004.07.025
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2014
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sg-nus-scholar.10635-987242023-10-25T22:28:15Z Formation of ultra-shallow p +/n junctions in silicon-on-insulator (SOI) substrate using laser annealing Ong, K.K. Pey, K.L. Lee, P.S. Wee, A.T.S. Chong, Y.F. Yeo, K.L. Wang, X.C. PHYSICS Boron Laser annealing Silicon-on-insulator 10.1016/j.mseb.2004.07.025 Materials Science and Engineering B: Solid-State Materials for Advanced Technology 114-115 SPEC. ISS. 25-28 MSBTE 2014-10-16T09:50:40Z 2014-10-16T09:50:40Z 2004 Conference Paper Ong, K.K., Pey, K.L., Lee, P.S., Wee, A.T.S., Chong, Y.F., Yeo, K.L., Wang, X.C. (2004). Formation of ultra-shallow p +/n junctions in silicon-on-insulator (SOI) substrate using laser annealing. Materials Science and Engineering B: Solid-State Materials for Advanced Technology 114-115 (SPEC. ISS.) : 25-28. ScholarBank@NUS Repository. https://doi.org/10.1016/j.mseb.2004.07.025 09215107 http://scholarbank.nus.edu.sg/handle/10635/98724 000226016400006 Scopus |
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National University of Singapore |
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NUS Library |
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Asia |
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Singapore Singapore |
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NUS Library |
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ScholarBank@NUS |
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Boron Laser annealing Silicon-on-insulator |
| spellingShingle |
Boron Laser annealing Silicon-on-insulator Ong, K.K. Pey, K.L. Lee, P.S. Wee, A.T.S. Chong, Y.F. Yeo, K.L. Wang, X.C. Formation of ultra-shallow p +/n junctions in silicon-on-insulator (SOI) substrate using laser annealing |
| description |
10.1016/j.mseb.2004.07.025 |
| author2 |
PHYSICS |
| author_facet |
PHYSICS Ong, K.K. Pey, K.L. Lee, P.S. Wee, A.T.S. Chong, Y.F. Yeo, K.L. Wang, X.C. |
| format |
Conference or Workshop Item |
| author |
Ong, K.K. Pey, K.L. Lee, P.S. Wee, A.T.S. Chong, Y.F. Yeo, K.L. Wang, X.C. |
| author_sort |
Ong, K.K. |
| title |
Formation of ultra-shallow p +/n junctions in silicon-on-insulator (SOI) substrate using laser annealing |
| title_short |
Formation of ultra-shallow p +/n junctions in silicon-on-insulator (SOI) substrate using laser annealing |
| title_full |
Formation of ultra-shallow p +/n junctions in silicon-on-insulator (SOI) substrate using laser annealing |
| title_fullStr |
Formation of ultra-shallow p +/n junctions in silicon-on-insulator (SOI) substrate using laser annealing |
| title_full_unstemmed |
Formation of ultra-shallow p +/n junctions in silicon-on-insulator (SOI) substrate using laser annealing |
| title_sort |
formation of ultra-shallow p +/n junctions in silicon-on-insulator (soi) substrate using laser annealing |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/98724 |
| _version_ |
1781786937824116736 |