Formation of ultra-shallow p +/n junctions in silicon-on-insulator (SOI) substrate using laser annealing
10.1016/j.mseb.2004.07.025
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Main Authors: | Ong, K.K., Pey, K.L., Lee, P.S., Wee, A.T.S., Chong, Y.F., Yeo, K.L., Wang, X.C. |
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Other Authors: | PHYSICS |
Format: | Conference or Workshop Item |
Published: |
2014
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Subjects: | |
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/98724 |
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Institution: | National University of Singapore |
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