Surface and interface properties of ion implanted 4H-silicon carbide

International Journal of Modern Physics B

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Bibliographic Details
Main Authors: Feng, Z.C., Lin, J., Yan, F., Zhao, J.H.
Other Authors: PHYSICS
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/98909
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Institution: National University of Singapore
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