Detection of oxidation stacking faults in silicon wafers by a multipass Fabry-Perot Rayleigh-Brillouin scattering spectrometer
Journal of Crystal Growth
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2014
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sg-nus-scholar.10635-989702024-11-10T23:04:04Z Detection of oxidation stacking faults in silicon wafers by a multipass Fabry-Perot Rayleigh-Brillouin scattering spectrometer Ng, S.C. Taijing, L. PHYSICS Journal of Crystal Growth 131 1-2 265-267 JCRGA 2014-10-16T09:53:37Z 2014-10-16T09:53:37Z 1993-07 Others Ng, S.C.,Taijing, L. (1993-07). Detection of oxidation stacking faults in silicon wafers by a multipass Fabry-Perot Rayleigh-Brillouin scattering spectrometer. Journal of Crystal Growth 131 (1-2) : 265-267. ScholarBank@NUS Repository. 00220248 http://scholarbank.nus.edu.sg/handle/10635/98970 NOT_IN_WOS Scopus |
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National University of Singapore |
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NUS Library |
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Asia |
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Singapore Singapore |
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NUS Library |
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ScholarBank@NUS |
| description |
Journal of Crystal Growth |
| author2 |
PHYSICS |
| author_facet |
PHYSICS Ng, S.C. Taijing, L. |
| format |
Others |
| author |
Ng, S.C. Taijing, L. |
| spellingShingle |
Ng, S.C. Taijing, L. Detection of oxidation stacking faults in silicon wafers by a multipass Fabry-Perot Rayleigh-Brillouin scattering spectrometer |
| author_sort |
Ng, S.C. |
| title |
Detection of oxidation stacking faults in silicon wafers by a multipass Fabry-Perot Rayleigh-Brillouin scattering spectrometer |
| title_short |
Detection of oxidation stacking faults in silicon wafers by a multipass Fabry-Perot Rayleigh-Brillouin scattering spectrometer |
| title_full |
Detection of oxidation stacking faults in silicon wafers by a multipass Fabry-Perot Rayleigh-Brillouin scattering spectrometer |
| title_fullStr |
Detection of oxidation stacking faults in silicon wafers by a multipass Fabry-Perot Rayleigh-Brillouin scattering spectrometer |
| title_full_unstemmed |
Detection of oxidation stacking faults in silicon wafers by a multipass Fabry-Perot Rayleigh-Brillouin scattering spectrometer |
| title_sort |
detection of oxidation stacking faults in silicon wafers by a multipass fabry-perot rayleigh-brillouin scattering spectrometer |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/98970 |
| _version_ |
1821234378845454336 |