Detection of oxidation stacking faults in silicon wafers by a multipass Fabry-Perot Rayleigh-Brillouin scattering spectrometer
Journal of Crystal Growth
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| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Published: |
2014
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| Online Access: | http://scholarbank.nus.edu.sg/handle/10635/98970 |
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| Institution: | National University of Singapore |