Ion beam lithography and nanofabrication: A review

10.1142/S0219581X05003139

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Bibliographic Details
Main Authors:	Watt, F., Bettiol, A.A., Van Kan, J.A., Teo, E.J., Breese, M.B.H.
Other Authors:	PHYSICS
Format:	Review
Published:	2014
Subjects:	Focused ion beam Ion beam lithography Ion projection lithography Nanofabrication Proton beam writing
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/99009
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Institution:	National University of Singapore

Description
Summary:	10.1142/S0219581X05003139

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