Ion beam lithography and nanofabrication: A review
10.1142/S0219581X05003139
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2014
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sg-nus-scholar.10635-990092023-10-25T22:28:15Z Ion beam lithography and nanofabrication: A review Watt, F. Bettiol, A.A. Van Kan, J.A. Teo, E.J. Breese, M.B.H. PHYSICS MATERIALS SCIENCE Focused ion beam Ion beam lithography Ion projection lithography Nanofabrication Proton beam writing 10.1142/S0219581X05003139 International Journal of Nanoscience 4 3 269-286 2014-10-16T09:54:05Z 2014-10-16T09:54:05Z 2005-06 Review Watt, F., Bettiol, A.A., Van Kan, J.A., Teo, E.J., Breese, M.B.H. (2005-06). Ion beam lithography and nanofabrication: A review. International Journal of Nanoscience 4 (3) : 269-286. ScholarBank@NUS Repository. https://doi.org/10.1142/S0219581X05003139 0219581X http://scholarbank.nus.edu.sg/handle/10635/99009 000216720000001 Scopus |
| institution |
National University of Singapore |
| building |
NUS Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| topic |
Focused ion beam Ion beam lithography Ion projection lithography Nanofabrication Proton beam writing |
| spellingShingle |
Focused ion beam Ion beam lithography Ion projection lithography Nanofabrication Proton beam writing Watt, F. Bettiol, A.A. Van Kan, J.A. Teo, E.J. Breese, M.B.H. Ion beam lithography and nanofabrication: A review |
| description |
10.1142/S0219581X05003139 |
| author2 |
PHYSICS |
| author_facet |
PHYSICS Watt, F. Bettiol, A.A. Van Kan, J.A. Teo, E.J. Breese, M.B.H. |
| format |
Review |
| author |
Watt, F. Bettiol, A.A. Van Kan, J.A. Teo, E.J. Breese, M.B.H. |
| author_sort |
Watt, F. |
| title |
Ion beam lithography and nanofabrication: A review |
| title_short |
Ion beam lithography and nanofabrication: A review |
| title_full |
Ion beam lithography and nanofabrication: A review |
| title_fullStr |
Ion beam lithography and nanofabrication: A review |
| title_full_unstemmed |
Ion beam lithography and nanofabrication: A review |
| title_sort |
ion beam lithography and nanofabrication: a review |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/99009 |
| _version_ |
1781786988521717760 |