Fabrication-tolerant active-passive integration scheme for vertically-coupled microring resonators

• Main Authors: TEE, Chyng Wen, Williams, KA, Penty, RV, White, IH
• Format: text
• Language: English
• Published: Institutional Knowledge at Singapore Management University 2006
• Subjects: Electromagnetic propagation; fiber coupling; large-scale integration; multimode waveguides; optical coupling; optical diffraction; optical fiber coupling; optical planar wave-guides; optical resonators; semiconductor device fabrication; semiconductor device modeling; semiconductor microring; waveguide couplers; Business
• Online Access: https://ink.library.smu.edu.sg/lkcsb_research/3337; https://ink.library.smu.edu.sg/context/lkcsb_research/article/4336/viewcontent/Fabrication_tolerant_active_passive_integration_scheme_for_vertically_coupled_microring_resonators.pdf
• Institution: Singapore Management University

The large-scale photonic integration of microring resonators in three dimensions made possible by recent developments in vertical coupling and wafer bonding technology is shown to be sensitive to lateral mask misalignment for the ring and bus waveguides introduced during the fabrication process. For...