Optimization of diamond-like carbon thin film on copper substrate for carbon nanotubes synthesis by ACVD technique

© 2017 Trans Tech Publications, Switzerland. In this research, demonstrate plasma treatment on copper substrate by Radio Frequency Plasma (RF) using a mixture of 70%C 2 H 2 + 30%H 2 as the working gases. The plasma exposure time were varied from 10, 20 and 30 min under the electrical power of 50 W...

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Main Authors: Suttichart C., Boonyawan D., Nhuapeng W., Thamjaree W.
格式: Book Series
出版: 2017
在線閱讀:https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85011360809&origin=inward
http://cmuir.cmu.ac.th/jspui/handle/6653943832/40866
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