Structure and optical properties of anatase thin films produced by filtered cathodic vacuum arc method
© 2016, Hanyang University. All rights reserved. Titanium dioxide (TiO 2 ) thin films were deposited on glass substrates by filtered cathodic vacuum arc system (lab-made) for various number of pulse modes at -50 VDC, and followed by 450°C annealing in air for 1 hr. The deposition pulses were 500 -2,...
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| Main Authors: | , |
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| Format: | Journal |
| Published: |
2017
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| Online Access: | https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85013272368&origin=inward http://cmuir.cmu.ac.th/jspui/handle/6653943832/42242 |
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| Institution: | Chiang Mai University |
| Summary: | © 2016, Hanyang University. All rights reserved. Titanium dioxide (TiO 2 ) thin films were deposited on glass substrates by filtered cathodic vacuum arc system (lab-made) for various number of pulse modes at -50 VDC, and followed by 450°C annealing in air for 1 hr. The deposition pulses were 500 -2,000 pulses and the anatase film thickness was 13.0-37.5 nm. In this research, the roughness was increased with the increasing in the number of deposition pulses and film thickness. The transmission at 600 nm wavelength was 65-85%, decreasing with the film thickness, and the optical energy gap was in the range of 3.55-3.65 eV. |
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